Film Composition Prediction by Spectroscopic Reflectometry Peter K. Schenck and Debra Kaiser Using pulsed laser deposition to prepare test films for analysis by high throughput spectroscopic reflectometry, it has been demonstrated that film thickness maps from individual target films can be used to predict the compositional variations in dual target combinatorial library films.

By normalizing the thickness maps with film density, the composition ratio can be determined. The predicted composition results from the thickness maps for the individual target films are as accurate as can be determined by chemical analysis. This is because there is minimal interaction affecting the laser deposition patterns of the two laser generated plumes during the preparation of the library films.