CVD Silicon Carbide ( SiC )

Reference: NIST Technical Note

Reference: NIST Structural Ceramics Database

Note: About Property Data Summaries.

Note: Abbreviations and Other Notes

Note: Other Materials


Material Summary:

[Ref. 1] Manufacturer........: Composites and Deposits Material Designation: CVD silicon carbide Material Form.......: Polycrystal Composition.........: SiC Processing..........:

References:

[1] S. W. Freiman, A. Williams, J. J. Mecholsky, and R. W. Rice, "Fracture of Si3N4 and SiC" Ceramic Microstructures, pp. 824-834 (1976).

Property Table:

Temperature = 23 °C Grain Porosity Fracture Fracture Measurement Measurement Comments Size Toughness Energy Method Environment [µm] [%] [MPa·m1/2] [J/m2] ------ -------- ------------ --------- ----------- ----------- -------------------------------- 1-3 16 AMDCB air Ref. 1; Fracture parallel to deposition 1-3 21 AMDCB Fracture perpendicular to deposition --------------------------------------------------------------------------------------------------------



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